Dmc 2d Matrix Set-Up

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Precaution

7.1.1 Ensure that all access areas are clear before attempting to open and close machine door.

7.1.2 The forcer of the Accretech moves on air cushion. Do no switch off the compressed air supply during operation. Do not attempt to move the forcer without the air cushion.

7.1.3 The platen must be clear of all debris. Any small object such as screw, washer, etc. can damage the platen if the chuck collides during movement

7.1.4 All auxiliary equipment movement during maintenance, it must not obstruct the emergency exit road or emergency equipment

7.2 PM Frequency

7.2.1 Monthly PM (RJM32-01-xx)

7.2.1.1 Cleaning the Material Handler System

7.2.1.1.1 Clean the following with Textwipe and IPA:

- Indexer and Platform

- Pre-align Chuck

- Transfer Arm surface

- Quickloader Arm

- Manual Loader Station

- Chuck Surface

7.2.1.1.2 Perform general cleaning on the surface of the machine with Textwipes and IPA.

Figure 1: Indexer and Platform

Figure 2: Pre-align Chuck

Figure 3: Transfer Arm

Figure 4: Chuck Surface

7.2.1.2 Cleaning the Platen

7.2.1.2.1 Check compress air pressure / vacuum supply pressure to be within specification limits as stated in Form.

7.2.1.2.2 Check for epoxy undercut or erosion between platen and forcer.

7.2.1.2.3 Inspect platen surface for any contamination / rust

7.2.1.2.4 Clean platen with Textwipes only. Do not use any chemical as it will wipe away the coating on the surface of the platen.

Figure 5: Platen

7.2.1.3 Chuck X-Y Platen Alignment

7.2.1.3.1 Press the “COMMAND” button on the touch screen and select “UNBLANK/BLANK FORCER”. Press the “eXecute”, “OK” and “Verify” to validate proper Chuck alignment.

7.2.1.3.2 Harbor the forcer against the rail seats, in the front left corner of the platen.

7.2.1.3.3 Press the “Verify” button to starts the chuck fiducial crosshair verification.

7.2.1.3.4 If the fiducial crosshair is located, the system concludes that unblanking completed successfully.

7.2.1.3.5 If the fiducial crosshair is not detected, the system will display a warning message and you will have to start the unblanking of the chuck all over again.

Weekly NWA Calibration for Probe Card (RJM32-02-xx)

*Note: ZVT8 and ZV-Z58 must be switched on to warm up for 30 minutes before calibration is performed.

7.2.1.4 Connect USB and all 8 gore cables cable from ZVT8 to ZV-Z58 (Calibration Unit) with Torque Wrench.

7.2.1.5 After connecting, go to SAW probe interface PC, select “Meas. Device” and select “NWA calibration unit”.

7.2.1.6 A message will appear “Connect Cal unit to the NWA”, ensure USB cable was connected between ZVT8 andy ZV-Z58, then select “continue”.

7.2.1.7 A message will appear “Connect port 1-8 to Cal unit”,ensure 8 gore cables were connected to all 1-8 port of ZV-Z58 respectively. Then select “continue”

7.2.1.8 Wait for it to load for about 3-5 minutes.

7.2.1.9 A message ‘Calibration finish’ will appear to indicate the calibration is done.

7.2.1.10 Then switch OFF the ZV-Z58.

7.2.1.11 Dismantle 8 gore cables and USB cable from the ZV-Z58.

7.2.1.12 On the SAW probe interface PC, go to “Meas. Device” and select the “Cable Check

*Note: Release machine for production and monitor first production results.

Calibration of the Probe card and NWA

7.2.1.12.1 This calibration is to be carrying out in one of the following condition:

- Monthly PM

- Replacement of Network Analyser

- Replacement of RF-Cable

- Suspected frequency measurement inaccuracy

7.2.3 Tower light checking

Check the function of tower light and record the results on wafer probing electroglas 4090 monthly pm form (rjm32-01-xx)

7.3 Equipment Power Up/Down and Buy-Off Procedure

7.3.1 Power Down

7.3.1.1 Ensure that no wafers are in process

7.3.1.2 Switch off HP file server and network analyzer.

7.3.1.3 Shut down Prober PC

7.3.1.4 Press the system power “OFF” button at the front of the machine.

7.3.1.5 Turn off CDA and vacuum from facility line.

Figure 6: Network Analyzer

Figure 7: System Power ‘ON’ and ‘OFF’ button

7.3.2 Power Up

7.3.2.1 Press the system power “ON” button. All the applicable modules and the Monitor will automatically power on.

7.3.2.2 Turn